Modelling, manufacture and test of a microchannel cooling plate for microelectronics packaging

نویسندگان

  • A. J. Pang
  • M.P.Y. Desmulliez
  • M. Leonard
  • R. S. Dhariwal
  • R. L. Reuben
  • A. S. Holmes
  • G. Hong
  • K. R. Pullen
  • F. Waldron
  • O. Slattery
  • M. Rencz
  • D. R. Emerson
  • R. W. Barber
چکیده

The modelling, simulation, fabrication and testing of a microchannel cooling plate are described in this article. The cooling component is to be used in microelectronic packaging applications. The nickelbased micro-channel cooling plate is fabricated on a glass substrate using a two-layer electroforming process borrowed from UV-LIGA. Forced convection of air or liquid is scheduled for this microchannel plate. The cooling plate was tested using a custommade test rig to measure pressure head as a function of mass flow rate. Hydraulic performance of the cooling plate is presented.

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تاریخ انتشار 2004